China (Mainland)
- Product Details
Keywords
- HFC-41
- 593-53-3
- 99%
Quick Details
- ProName: Fluoromethane
- CasNo: 593-53-3
- Molecular Formula: CH3F
- Application: High-purity monofluoromethane HFC-41 g...
- Port: SHANGHAI
- ProductionCapacity: Metric Ton/Day
- Purity: >99%
- LimitNum: 0 Metric Ton
- Grade: Industrial Grade,Electron Grade
Superiority
Product name: fluoromethane
CAS No.: 593-53-3
Molecular formula: CH3F
Molecular weight: 34.03
Purity: >99%
Appearance: colorless transparent gas
Boiling point: -78.4 °C
Freezing point: -142 °C
Density: 0.61 g/ml, at 25 °C (lit.)
GWP100 years: 150
Storage: 2-8 °C
Packing: 4.64L/10.2L/44L cylinder
Application: High-purity monofluoromethane HFC-41 gas is a green, highly efficient etching gas that selectively etches thin films of silicon compounds for use in etching processes for semiconductors and electronic products.